Strongly tunable nonlinear MEMS resonators by electro-thermoelastic buckling

This talk presents the benefit of buckling in strongly tuning nonlinear MEMS resonators. In particular, shows experimental achieving more than 230% natural frequency drumhead Moreover, experiments demonstrate that switches response between purely stiffening, softening, and stiffening-to-softening nonlinearities. We tune state these by controlling electric voltage temperature Therefore, resonators undergo electrostatically-mediated thermoelastic where specific combinations are required to access distinct vibrational responses. explain observed linear responses a reduced-order model (ROM) lumps resonator into 1-degree-of-freedom mass connected springs reflecting bending, stretching, electrostatic forces, thermal expansions, residual stresses. The ROM mimics von Mises trusses membrane without need for exact geometry or structure developed electro-thermoelastic tunability present useful applications on-chip acoustic devices different fields such as signal manipulation, filtering, waveguides.